Special UHV Cleaning

Ultra-High Vacuum (UHV) is a vacuum system with pressure on the order of 1E-10 torr and less. Surface cleanliness is crucial and prerequisite in vacuum environment. All contaminants must be removed from the surfaces, so they do not desorb and migrate throughout vacuum system. Poor surface preparation will produce gas loads (outgassing) or deposit on components.


Common contaminants in vacuum system are mobile ions, outgassing and hydrocarbon compound. Outgassing can be easily happened which gasses and vapours are released under vacuum. Choice of material used in UHV environment, for example extremely low vapour pressure property and surface cleaning of components are the 2 major considerations in order to prevent outgassing and other contaminants occurred.


ATC provides effective surface cleaning to ensure high surface cleanliness is achieved. Components are initially cleaned with special cleaner to degrease the surfaces. Subsequently, components will go through multiple cleaning baths followed by a series of deionized water rinsing with the help of ultrasonic. Baking is the final step to ensure residual gasses are removed from the component’s surface.


Cleaning parameters like pH and concentration of all cleaning baths are strictly monitor in order to produce effective cleaning. Quality of deionized water is always maintained to provide quality rinsing during cleaning process.

Process Specification Material Tank Size (L) x (W) x (H) mm Location
UHV Cleaning AMAT 0250-20000 Appendix D Aluminium 1000 x 800 x 600 Kuala Lumpur
AMAT 0250-70351 Type I & Type II Aluminium
AMAT 0250-63409 Aluminium
AMAT 0250-13605 Type 1 & 2 & 3, Class IB & II Stainless Steel 300 Series
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